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About this Materials Science article
In situ photoelectron spectroscopic characterization of c-BN films deposited via plasma enhanced chemical vapor deposition employing fluorine chemistry by Shammas, Joseph; Sun, Tianyin; Koeck, Franz A.M.; Rezikyan, Aram; Nemanich, Robert J. is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Shammas, Joseph; Sun, Tianyin; Koeck, Franz A.M.; Rezikyan, Aram; Nemanich, Robert J.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0925-9635)
- Published
- 2015
- Field
- Materials Science (Physical Sciences)