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About this Engineering article
Barrier Metals and Structures in Aluminum Interconnects. by Shima, Shohei is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Shima, Shohei
- Publisher
- The Japan Institute of Metals; Japan Institute of Metals (ISSN 1340-2625)
- Published
- 1997
- Field
- Engineering (Physical Sciences)