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About this Engineering article
On the Effective Sputter Yield During Magnetron Sputter Deposition by Depla, D. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Depla, D.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2014
- Field
- Engineering (Physical Sciences)