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About this Engineering article
Improvement on Sheet Resistance Uniformity of Nickel Silicide by Optimization of Silicidation Conditions by Tomita, R.; Kimura, H.; Yasuda, M.; Maeda, K.; Ueno, S.; Tonegawa, T.; Fujimoto, T.; Moritoki, M.; Iwai, H. is a Engineering article available to read on EtoBox.
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- Author
- Tomita, R.; Kimura, H.; Yasuda, M.; Maeda, K.; Ueno, S.; Tonegawa, T.; Fujimoto, T.; Moritoki, M.; Iwai, H.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 2013
- Language
- EN
- Field
- Engineering (Physical Sciences)