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Can I read Analysis of Problem in Mathematical Model for Shadowed Sputtering on EtoBox?
Analysis of Problem in Mathematical Model for Shadowed Sputtering by L.A. Sevastianov; E.P. Zhidkov is a Physics and Astronomy article available to read on EtoBox.
What is Analysis of Problem in Mathematical Model for Shadowed Sputtering about?
A mathematical model for shadowed sputtering is an integral equation In frame of a given model there exist three problems: -a straight problem of predicting Y using given A and X; -an auxiliary inverse problem of restoring X using experimentally given A and Y ; -a main inverse problem of synthesis the shadowing mask parameters and a mask function A using restored X and prescribed Y . Properties of integral operator of these problems let solving in a stable manner both inverse problems. Besides the methods of their solving and their properties make it possible to approach a predicted function of a sputtered layer with any given accuracy.
Who reads Analysis of Problem in Mathematical Model for Shadowed Sputtering?
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- L.A. Sevastianov; E.P. Zhidkov
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0010-4655)
- Published
- 2000
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)