About this scholarly article

IEEE Micro Electro Mechanical Systems - Fort Lauderdale, FL, USA (7-10 Feb. 1993)] [1993] Proceedings IEEE Micro Electro Mechanical Systems - Photo-assisted electrochemical machining of micromechanical structures by Mlcak, R.; Tuller, H.L.; Greiff, P.; Sohn, J. is a scholarly article available to read on EtoBox.

Author

Mlcak, R.; Tuller, H.L.; Greiff, P.; Sohn, J.

Publisher

IEEE

Published

1993