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About this Engineering article
Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing by Mimura, Takanori; Katayama, Kiliha; Shimizu, Takao; Uchida, Hiroshi; Kiguchi, Takanori; Akama, Akihiro; Konno, Toyohiko J.; Sakata, Osami; Funakubo, Hiroshi is a Engineering article available to read on EtoBox.
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- Author
- Mimura, Takanori; Katayama, Kiliha; Shimizu, Takao; Uchida, Hiroshi; Kiguchi, Takanori; Akama, Akihiro; Konno, Toyohiko J.; Sakata, Osami; Funakubo, Hiroshi
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 2016
- Field
- Engineering (Physical Sciences)