About this scholarly article

SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - A comb-drive scanning-head array for fast scanning-probe microscope measurements by Gao, S.; Wolff, H.; Herrmann, K.; Brand, U.; Hiller, K.; Hahn, S.; Sorger, A.; Mehner, J.; Schmid, Ulrich; Sánchez-Rojas, José Luis; Leester-Schaedel, Monika is a scholarly article available to read on EtoBox.

Author

Gao, S.; Wolff, H.; Herrmann, K.; Brand, U.; Hiller, K.; Hahn, S.; Sorger, A.; Mehner, J.; Schmid, Ulrich; Sánchez-Rojas, José Luis; Leester-Schaedel, Monika

Publisher

SPIE

Published

2011

Language

EN