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Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I : and Interconnect and Contact Metallization--Materials, Processes, and Reliability by Panayotis C Andricacos; Electrochemical Society Dielectric Science and Technology Division; Electrochemical Society Electronics Division; Electrochemical Society Electrodeposition Division; Electrochemical Society Meeting (193rd : 1998 : San Diego, Calif); Electrochemical Society Meeting (194th : 1998 : Boston, Mass); Symposium on Electrochemical Processing in ULSI Fabrication; Symposium on Interconnect and Contact Metallization--Materials, Processes, and Reliability is a book available to read on EtoBox.

What is Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I : and Interconnect and Contact Metallization--Materials, Processes, and Reliability about?

viii, 274 p. : 23 cm "The Symposium on Electrochemical Processing in ULSI Fabrication I was held on May 4 and 5, 1998 in San Diego, California in the context of the 193th[sic] meeting of the Electrochemical Society ... This symposium on Interconnect and Contact Metallization: Materials, Processes, and Reliability was held in Boston during the 194th meeting of The Electrochemical Society, November 1-6, 1998."--Preface Includes bibliographic references and indexes

Author

Panayotis C Andricacos; Electrochemical Society Dielectric Science and Technology Division; Electrochemical Society Electronics Division; Electrochemical Society Electrodeposition Division; Electrochemical Society Meeting (193rd : 1998 : San Diego, Calif); Electrochemical Society Meeting (194th : 1998 : Boston, Mass); Symposium on Electrochemical Processing in ULSI Fabrication; Symposium on Interconnect and Contact Metallization--Materials, Processes, and Reliability

Publisher

Pennington, New Jersey: Electrochemical Society

Published

1999

Language

EN

ISBN

9781566772006

Subjects

Engineering, Science, Chemistry