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About this Engineering article
Petri nets in semiconductor manufacturing automation: A review by Jeng, MuDer; Zhou, MengChu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Jeng, MuDer; Zhou, MengChu
- Publisher
- Elsevier - International Federation of Automatic Control (IFAC); Elsevier BV (ISSN 1474-6670)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)