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About this Engineering article
Electrostatic Control of Mechanical Quality Factors for Surface-micromachined Lateral Resonators by Lee, Ki Bang; Cho, Young-Ho is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Lee, Ki Bang; Cho, Young-Ho
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing; ScienceOpen (ISSN 0960-1317)
- Published
- 1996
- Language
- EN
- Field
- Engineering (Physical Sciences)