About this scholarly article

SPIE Proceedings [SPIE SPIE Europe Microtechnologies for the New Millennium - Dresden, Germany (Monday 4 May 2009)] Smart Sensors, Actuators, and MEMS IV - SAW-grade SiO 2 for advanced microfluidic devices by Winkler, Andreas; Schmid, Ulrich; Menzel, Siegfried; Schmidt, Hagen is a scholarly article available to read on EtoBox.

Author

Winkler, Andreas; Schmid, Ulrich; Menzel, Siegfried; Schmidt, Hagen

Publisher

SPIE

Published

2009

Language

EN