About this scholarly article

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - On-wafer electro-mechanical characterization of silicon MEMS switches by Lorenzelli, L.; Rangra, K.J.; Collini, C.; Giacomozzi, F.; Margesin, B.; Pianegiani, F. is a scholarly article available to read on EtoBox.

Author

Lorenzelli, L.; Rangra, K.J.; Collini, C.; Giacomozzi, F.; Margesin, B.; Pianegiani, F.

Publisher

IEEE

Published

2003

Language

EN