About this Engineering article
Combined Beam Profile Reflectometry, Beam Profile Ellipsometry and Ultraviolet-visible Spectrophotometry for the Characterization of Ultrathin Oxide-nitride-oxide Films on Silicon by Leng, J. M.; Opsal, J.; Aspnes, D. E. is a Engineering article available to read on EtoBox.
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- Author
- Leng, J. M.; Opsal, J.; Aspnes, D. E.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 1999
- Field
- Engineering (Physical Sciences)