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Influence of surface roughness on near-surface depth analysis from X-ray reflectivity measurements by Yoshikazu Fujii is a Engineering article available to read on EtoBox.
What is Influence of surface roughness on near-surface depth analysis from X-ray reflectivity measurements about?
## Abstract X‐ray reflectometry is a powerful tool for investigations of rough surfaces and interface structures. However, in previous studies, the calculation of the X‐ray reflectivity often show a strange effect where interference effects would increase at a rough surface. Here, we propose that this unexpected result of such calculations of the X‐ray reflectivity originates in a neglect of the effect of a decrease in the intensity of refracted X‐rays due to diffuse scattering at a rough surface and interface. In the present study, we present a new, accurate analysis of the X‐ray reflectivity from a multilayer surface taking into account roughness‐induced diffuse scattering. We calculated the X‐ray reflectivity for the W/Si system using a reduced Fresnel transmission coefficient at a rough surface and interface. The calculated reflectivity using this approach gave a physically reasonable result. A new approach using a reduced Fresnel transmission coefficient at a rough surface and interface allowed us to calculate physically reasonable values of the X‐ray reflectivity. Copyright © 2010 John Wiley & Sons, Ltd.
Who reads Influence of surface roughness on near-surface depth analysis from X-ray reflectivity measurements?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yoshikazu Fujii
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Inc.; Wiley; Research Square (ISSN 0142-2421)
- Published
- 2010
- Language
- EN
- Field
- Engineering (Physical Sciences)