About this scholarly article

2009 International Workshop on Junction Technology - Stress measurement of carbon cluster implanted layers with in-plane diffraction technique by Jiro Matsuo, ; Kazuya Ichiki, ; Masaki Hada, ; Satoshi Ninomiya, ; Toshio Seki, ; Aoki, Takaaki; Tsutomu Nagayama, ; Masayasu Tanjyo, is a scholarly article available to read on EtoBox.

Author

Jiro Matsuo, ; Kazuya Ichiki, ; Masaki Hada, ; Satoshi Ninomiya, ; Toshio Seki, ; Aoki, Takaaki; Tsutomu Nagayama, ; Masayasu Tanjyo,

Publisher

IEEE

Published

2009