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Deposition of SiC and AlN thin films by laser ablation by Jens Meinschien; Fritz Falk; Hartmut Hobert; Herbert Stafast is a Materials Science article available to read on EtoBox.

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SiC and AlN thin films were deposited on silicon substrates by KrF excimer laser ablation from SiC and AlN targets. They were characterized by FTIR and Raman spectroscopy, X-ray diffraction, Auger electron spectroscopy, scanning and transmission electron microscopy. Improvements in crystalline SiC thin film deposition by laser ablation combined with w laser surface activation were reported recently M.

Who reads Deposition of SiC and AlN thin films by laser ablation?

Author

Jens Meinschien; Fritz Falk; Hartmut Hobert; Herbert Stafast

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)

Published

1999

Language

EN

Field

Materials Science (Physical Sciences)