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About this Engineering article
Trends in automated diffusion furnace systems for large wafers : Joseph C. Maliakal, Daniel J. Fischer, Jr. and Arthur Waugh. Solid St. Technol. 105 (December 1984) is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 1986
- Field
- Engineering (Physical Sciences)