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About this Engineering article
Experimental Mechanical Stress Characterization of Micro-Electro-Mechanical-Systems Device Using Confocal Laser Scanning Microscope Combined with Raman Spectrometer System by M. Yamaguchi; S. Ueno; I. Miura; W. Erikawa is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- M. Yamaguchi; S. Ueno; I. Miura; W. Erikawa
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2007
- Language
- EN
- Field
- Engineering (Physical Sciences)
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