About this scholarly article

2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682) - Optical scanner prepared by wafer bending technique by Ishimori, M.; Jong-Hyeong Song, ; Sasaki, M.; Hane, K. is a scholarly article available to read on EtoBox.

Author

Ishimori, M.; Jong-Hyeong Song, ; Sasaki, M.; Hane, K.

Publisher

IEEE

Published

2003

Language

EN