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About this Physics and Astronomy article
Polymer Diffusion as a Probe of Damage in Ion or Plasma Etching by Tead, S. F.; Vanderlinde, W. E.; Marra, G.; Ruoff, A. L.; Kramer, E. J.; Egitto, F. D. is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- Tead, S. F.; Vanderlinde, W. E.; Marra, G.; Ruoff, A. L.; Kramer, E. J.; Egitto, F. D.
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 1990
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)