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Measuring Contact Resistance with TLM by jerryliao is a document available to read on EtoBox.
This document discusses techniques for measuring contact resistance in semiconductor devices using transmission line model (TLM) measurements. It explains that TLM measurements involve fabricating test structures with contacts spaced at different lengths and measuring the resistance between contact pairs. By plotting resistance versus contact spacing and extrapolating, one can determine contact resistance, sheet resistance, and transfer length, which is used to calculate contact resistivity. Two examples an
- Author
- jerryliao
- Language
- EN