About this scholarly article

Proceedings of 11th International Conference on Ion Implantation Technology - Ion implantation by plasma immersion technique by Thomae, R.; Bender, H.; Halder, J.; Hilschert, F.; Klein, H.; Schafer, J.; Seiler, B.; Mayer-Strane, ; Main, D.F.A.; Thomae, R. is a scholarly article available to read on EtoBox.

Author

Thomae, R.; Bender, H.; Halder, J.; Hilschert, F.; Klein, H.; Schafer, J.; Seiler, B.; Mayer-Strane, ; Main, D.F.A.; Thomae, R.

Publisher

IEEE

Published

1997

Language

EN