Opening book details…
About this Engineering article
Mechanical Properties of 3C-SiC Films for MEMS Applications by Reddy, Jayadeep Deva; Volinsky, Alex A.; Frewin, Christopher L.; Locke, Chris; Saddow, Stephen E. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Reddy, Jayadeep Deva; Volinsky, Alex A.; Frewin, Christopher L.; Locke, Chris; Saddow, Stephen E.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2007
- Language
- EN
- Field
- Engineering (Physical Sciences)