About this scholarly article

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV - Chemical rate model for the surface pyrolysis of tetrakis(dimethylamido)titanium to form titanium nitride films by Toprac, Anthony J.; Iacoponi, John A.; Littau, Karl A.; Toprac, Anthony J.; Dang, Kim is a scholarly article available to read on EtoBox.

Author

Toprac, Anthony J.; Iacoponi, John A.; Littau, Karl A.; Toprac, Anthony J.; Dang, Kim

Publisher

SPIE

Published

1998