About this scholarly article

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Porous silicon as a sacrificial layer used in rf MEMS by Cong, Peng; Liu, Li-Tian; Ding, Yong; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M. is a scholarly article available to read on EtoBox.

Author

Cong, Peng; Liu, Li-Tian; Ding, Yong; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.

Publisher

SPIE

Published

2001

Language

EN