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Vacuum Chamber Design Overview by 김대연 is a document available to read on EtoBox.

1. A virtual leak will not be detected in a normal helium leak testing cycle. As the chamber pumps down from atmospheric pressure to molecular flow, the gas molecules within the trapped volume can only be pumped out at a rate proportional to the conductance of the path connecting the trapped volume to the chamber volume. This rate is the "virtual leak". 2. A virtual leak will become apparent during the system pump down cycle if the vacuum pumps cannot keep up with the gas load from the virtual leak and ul

Author

김대연

Language

EN