About this scholarly article

2014 IEEE International Frequency Control Symposium (FCS) - Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators by Zhu, Haoshen; Lee, Joshua E.-Y. is a scholarly article available to read on EtoBox.

Author

Zhu, Haoshen; Lee, Joshua E.-Y.

Publisher

IEEE

Published

2014

Language

EN