About this scholarly article

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Double Pass Metallization For Cmos Aluminum Actuators by Buhler, J.; Funk, J.; Steiner, F.-P.; Sarro, P.M.; Baltes, H. is a scholarly article available to read on EtoBox.

Author

Buhler, J.; Funk, J.; Steiner, F.-P.; Sarro, P.M.; Baltes, H.

Publisher

IEEE

Published

1995