About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MOEMS and Miniaturized Systems II - Development of optical MEMS carbon dioxide sensors by Moelders, Nicholas; McNeal, Mark P.; Pralle, Martin U.; Last, Lisa; Ho, William; Greenwald, Anton C.; Daly, James T.; Johnson, Edward A.; George, Thomas; Choi, Daniel S.; Motamedi, M. Edward; Goering, Rolf is a scholarly article available to read on EtoBox.

Author

Moelders, Nicholas; McNeal, Mark P.; Pralle, Martin U.; Last, Lisa; Ho, William; Greenwald, Anton C.; Daly, James T.; Johnson, Edward A.; George, Thomas; Choi, Daniel S.; Motamedi, M. Edward; Goering, Rolf

Publisher

SPIE

Published

2001

Language

EN