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About this scholarly article
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Elastomer-supported cold welding for room temperature wafer-level bonding by Zhang, W.Y.; Ferguson, G.S.; Tatic-Lucic, S. is a scholarly article available to read on EtoBox.
- Author
- Zhang, W.Y.; Ferguson, G.S.; Tatic-Lucic, S.
- Publisher
- IEEE
- Published
- 2004
- Language
- EN
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