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Low-temperature Supercritical Dehydroxylation for Achieving an Ultra-low Subthreshold Swing of Thin-film Transistors by Kuan-Chang Chang; Luodan Hu; Kang Qi; Lei Li; Xinnan Lin; Shengdong Zhang; Ziwen Wang; Ying-Chih Lai; Heng-Jui Liu; Tze-Peng Kuo is a Materials Science article available to read on EtoBox.
What is Low-temperature Supercritical Dehydroxylation for Achieving an Ultra-low Subthreshold Swing of Thin-film Transistors about?
Thin-film transistors (TFTs) have been widely used in the increasingly advanced field of displays. However, it remains a challenge for TFTs to overcome the poor subthreshold swing in the fast switching and highspeed applications. Here, we provide a solution to the above-mentioned challenge via supercritical dehydroxylation, which combines a low temperature, environmentally friendly supercritical fluid technology with a CaCl 2 treatment. An embedded structure of amorphous indium gallium zinc oxide (a-IGZO) TFTs with double-layer high-k dielectric containing Ta 2 O 5 and SiO 2 layers was first manufactured. The subthreshold swing of the fabricated TFTs treated with supercritical dehydroxylation was optimized to an ultra-low value of 72.7 mV dec -1 . Moreover, other key figures of merits including threshold voltage, on/off ratio and field effect mobility all improved after the supercritical dehydroxylation. The bandgap of the gate dielectric material increased due to the supercritical dehydroxylation verified by the current conduction mechanism. Besides, numerous material analyses further confirmed that owing to the supercritical dehydroxylation the dominant dehydration reactions can
Who reads Low-temperature Supercritical Dehydroxylation for Achieving an Ultra-low Subthreshold Swing of Thin-film Transistors?
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Kuan-Chang Chang; Luodan Hu; Kang Qi; Lei Li; Xinnan Lin; Shengdong Zhang; Ziwen Wang; Ying-Chih Lai; Heng-Jui Liu; Tze-Peng Kuo
- Publisher
- Royal Society of Chemistry (RSC)
- Published
- 2021
- Language
- EN
- Field
- Materials Science (Physical Sciences)