Opening book details…
About this Engineering article
Evaluation of Polycrystalline Silicon Membranes on Fused Silica for X-ray Lithography Masks by Trimble, L. E. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Trimble, L. E.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 1989
- Language
- EN
- Field
- Engineering (Physical Sciences)