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Electrostatic Inchworm Microsystem with Long Range Translation by M.V. Shutov; D.L. Howard; E.E. Sandoz; J.M. Sirota; R.L. Smith; S.D. Collins is a Engineering article available to read on EtoBox.

What is Electrostatic Inchworm Microsystem with Long Range Translation about?

The general design, fabrication, and development of an electrostatic translational microstage based on the inchworm principal of actuation is presented. The microstage is incorporated in a complete microsystem package that allows long range translation of the microstage through consecutive clamping to either an oscillating driver arm or stationary substrate. Actuation step size is user adjustable from 0.05 to 2 m through the addition of a supplementary electrostatic actuator that controls the oscillation amplitude of the driver arm. Voltage to the microstage is delivered through coupled series capacitors allowing all external electrical connections to reside on the stationary substrate and allowing the microstage to translate free from the mechanical disturbances caused by direct electrical wiring. The inchworm microsystem is capable of arbitrarily large translation distances with nanometer resolution.

Who reads Electrostatic Inchworm Microsystem with Long Range Translation?

Author

M.V. Shutov; D.L. Howard; E.E. Sandoz; J.M. Sirota; R.L. Smith; S.D. Collins

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)

Published

2004

Language

EN

Field

Engineering (Physical Sciences)