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About this Engineering article

Ge Volatilization Products in High-k Gate Dielectrics by E. Golias; L. Tsetseris; A. Dimoulas; S.T. Pantelides is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
E. Golias; L. Tsetseris; A. Dimoulas; S.T. Pantelides
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
Published
2011
Language
EN
Field
Engineering (Physical Sciences)

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