About this scholarly article

2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Silicon/quartz bonding and quartz deep RIE for the fabrication of quartz resonator structures by Hyoung-Kyoon Jung, ; Young-Suk Hwang, ; Ik-Jae Hyeon, ; Yong-Kweon Kim, ; Chang-Wook Baek, is a scholarly article available to read on EtoBox.

Author

Hyoung-Kyoon Jung, ; Young-Suk Hwang, ; Ik-Jae Hyeon, ; Yong-Kweon Kim, ; Chang-Wook Baek,

Publisher

IEEE

Published

2008