About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - Low-doped etch stopping for micromechanical device production by Murfett, David B.; Haskard, Malcolm R.; Marriage, Alan J.; Markus, Karen W. is a scholarly article available to read on EtoBox.

Author

Murfett, David B.; Haskard, Malcolm R.; Marriage, Alan J.; Markus, Karen W.

Publisher

SPIE

Published

1995

Language

EN