About this scholarly article

2014 International Workshop on Junction Technology (IWJT) - FinFET multi-Vt tuning with metal gate work function modulation by plasma doping by Han, Keping; Lee, Jun; Tang, Shan; Maynard, Helen; Yoshida, Naomi; Brand, Adam is a scholarly article available to read on EtoBox.

Author

Han, Keping; Lee, Jun; Tang, Shan; Maynard, Helen; Yoshida, Naomi; Brand, Adam

Publisher

IEEE

Published

2014

Language

EN