About this scholarly article

SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - A high thermal resistance MEMS-based Pirani vacuum sensor chip by Dams, Florian; Schreiner, Rupert; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika is a scholarly article available to read on EtoBox.

Author

Dams, Florian; Schreiner, Rupert; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika

Publisher

SPIE

Published

2013

Language

EN