About this Engineering article
Formation of epitaxial CoSi2 on Si(100): Role of the annealing ambient by Vantomme, André; Nicolet, Marc-A.; Bai, Gang; Fraser, David B is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Vantomme, André; Nicolet, Marc-A.; Bai, Gang; Fraser, David B
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)