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SiNx thickness dependent morphology and mechanical properties of CrAlN/SiNx nanomultilayers by Li, Wei; Liu, Ping; Zhao, Yongsheng; Zhang, Ke; Ma, Fengcang; Liu, Xinkuan; Chen, Xiaohong; He, Daihua is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Li, Wei; Liu, Ping; Zhao, Yongsheng; Zhang, Ke; Ma, Fengcang; Liu, Xinkuan; Chen, Xiaohong; He, Daihua
Publisher
Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
Published
2013
Language
EN
Field
Engineering (Physical Sciences)

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