About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - MEMS CAD and foundries: where are we going? by Karam, Jean Michel; Chau, Kevin H.; French, Patrick J. is a scholarly article available to read on EtoBox.

Author

Karam, Jean Michel; Chau, Kevin H.; French, Patrick J.

Publisher

SPIE

Published

1997