About this scholarly article

ECS Transactions - Advanced Electrochemical Processes for Sub-50 nm On-chip Metallization by Akolkar, Rohan; Cheng, Chin-Chang; Chebiam, Ramanan; Fajardo, Arnel; Dubin, Valery is a scholarly article available to read on EtoBox.

Author

Akolkar, Rohan; Cheng, Chin-Chang; Chebiam, Ramanan; Fajardo, Arnel; Dubin, Valery

Publisher

ECS

Published

2007

Language

EN