Opening book details…
About this Engineering article
Submicron optical pattern generator—Electromagnetic drive with automated exposure system by Nishizawa, Jun-ichi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Nishizawa, Jun-ichi
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0022-5355)
- Published
- 1979
- Field
- Engineering (Physical Sciences)