Opening book details…
About this Engineering article
Supercritical CO2 reactor for wafer-scale thin film deposition: reactor concept, numerical results, and Cu depositio. by Kondoh, Eiichi; Ueno, Takahiro; Kurita, Shuhei; Watanabe, Mitsuhiro; Yamamoto, Satoshi; Suemasu, Tatsuo is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kondoh, Eiichi; Ueno, Takahiro; Kurita, Shuhei; Watanabe, Mitsuhiro; Yamamoto, Satoshi; Suemasu, Tatsuo
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0896-8446)
- Published
- 2015
- Field
- Engineering (Physical Sciences)