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About this Engineering article
Effect of Oxygen Gas Addition on Preparation of Iridium and Platinum Films by Metal-Organic Chemical Vapor Deposition by Goto, Takashi; Vargas, J. Roberto; Hirai, Toshio is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Goto, Takashi; Vargas, J. Roberto; Hirai, Toshio
- Publisher
- The Japan Institute of Metals; Japan Institute of Metals (JIM); Sendai: Japan Institute of Metals; Japan Institute of Metals (ISSN 0916-1821)
- Published
- 1999
- Field
- Engineering (Physical Sciences)
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