About this scholarly article

SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - In-situ monitoring of submicron polysilicon linewidths using diffraction gratings by Chapados, Jr., Phillip; Paranjpe, Ajit P.; Bondur, James A.; Castleman, Gary; Harriott, Lloyd R.; Turner, Terry R. is a scholarly article available to read on EtoBox.

Author

Chapados, Jr., Phillip; Paranjpe, Ajit P.; Bondur, James A.; Castleman, Gary; Harriott, Lloyd R.; Turner, Terry R.

Publisher

SPIE

Published

1993