Can I read A Novel Contact and Non-contact Hybrid Profilometer on EtoBox?

A Novel Contact and Non-contact Hybrid Profilometer by Jian-Ping Yun; Su-Ping Chang; Tie-Bang Xie; Ling-Ling Zhang; Guo-Yuan Hu is a Engineering article available to read on EtoBox.

What is A Novel Contact and Non-contact Hybrid Profilometer about?

A novel hybrid measuring instrument, developed for the characterization of engineering surface, is presented. This instrument is capable of contact and non-contact measurement, and both measurement systems are based on a Linnik interference microscope. So the instrument has a lower cost compared with other counterparts. For the contact measurement, the vertical resolution is less than 1 nm, and for the non-contact measurement, better than 0.5 nm. This paper describes the system and its performance along with results of measuring various samples.

Who reads A Novel Contact and Non-contact Hybrid Profilometer?

Author

Jian-Ping Yun; Su-Ping Chang; Tie-Bang Xie; Ling-Ling Zhang; Guo-Yuan Hu

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0141-6359)

Published

2009

Language

GL

Field

Engineering (Physical Sciences)