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About this Materials Science article
The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C‐Axis Tilted AlN Films by Chen, Ying-Chung; Chang, Wei-Tsai; Kao, Kuo-Sheng; Yang, Chun-Hung; Cheng, Chien-Chuan is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Chen, Ying-Chung; Chang, Wei-Tsai; Kao, Kuo-Sheng; Yang, Chun-Hung; Cheng, Chien-Chuan
- Publisher
- Hindawi Publishing Corporation; Hindawi Limited; [New York N.Y.]: Hindawi, 2006-; London: Hindawi (ISSN 1687-4110)
- Published
- 2013
- Field
- Materials Science (Physical Sciences)