About this Engineering article
3-D Silicon-on-Insulator Integrated Circuits With NFET and PFET on Separate Layers Using Au/SiO2 Hybrid Bonding by Goto, Masahide; Hagiwara, Kei; Iguchi, Yoshinori; Ohtake, Hiroshi; Saraya, Takuya; Higurashi, Eiji; Toshiyoshi, Hiroshi; Hiramoto, Toshiro is a Engineering article available to read on EtoBox.
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- Author
- Goto, Masahide; Hagiwara, Kei; Iguchi, Yoshinori; Ohtake, Hiroshi; Saraya, Takuya; Higurashi, Eiji; Toshiyoshi, Hiroshi; Hiramoto, Toshiro
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0018-9383)
- Published
- 2014
- Language
- EN
- Field
- Engineering (Physical Sciences)